DYNAMICAL THEORY OF X-RAY DIFFRACTION FROM DAMAGED EPITAXIAL LAYERS WITH CONSTANT STRAIN GRADIENT

14 сентября 2018
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Контактные данные автора публикации PUNEGOV V.I., VISHNJAKOV Y.V.
Ссылка на публикацию в интернете iopscience.iop.org/0022-3727/28/4A/036?fromSearchPage=true

Аннотация

Using the statistical approach to dynamical X-ray diffraction, we found the exact analytical solutions for coherently and incoherently scattered intensity from a damaged epitaxial layer with a constant strain gradient. These solutions and numerical methods were applied to simulations of rocking curves and scattered intensity distributions with depth. It is shown that rocking curves and X-ray intensity depth distributions have oscillatory structure due to the interference of scattered waves from different regions of a graded layer.
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