A multipurpose probe sensor for scanning nanohardness testers. Instruments and Experimental Techniques Volume 56, Issue 5, September 2013, Pages 576-583

The construction of the multifunctional probe sensor, which combines the functions of a scanning probe microscope, a nanohardness tester, and a tribometer, is described and simulation results for different operating modes of this device are presented. An analytical model for the probe self-oscillation mode within a self-oscillation scheme of excitation is proposed. The characteristics of the sensor under scanning conditions and during measurements in the force-spectroscopy mode are analyzed. Operability tests are conducted and the main characteristics of the probe are determined.
Indexed keywords
Multifunctional probes; Nanohardness testers; Operating modes; Probe sensor; Scanning conditions; Self-oscillation modes; Self-oscillations; Tribometers