MIS-sensors with different metal and insulator layers. Automation and Remote Control Volume 74, Issue 2, 2013, Pages 295-300

Several modifications of MIS-sensors manufactured using the thin-film laser evaporation technology with different insulator layers and metal electrodes are presented. Metrological characteristics of these MIS-sensors are established. Two types of the sensors possessing abnormally high and low sensitivities to H2, H2S, NO2 and NH3 are identified; the stated types are of practical interest in applications as sensitive elements of gas analyzers. Finally, the presence of catalytic properties in metal electrodes is demonstrated to be not necessary for sensitivity of the devices. This fact seems important for developing the microscopic theory of sensitivity of MIS-sensors.
Indexed keywords
Catalytic properties; Insulator layer; Laser evaporation; Low sensitivity; Metal electrodes; Metrological characteristics; Microscopic theory; Sensitive elements