Investigation into sources of random uncertainties in the NanoScan-3Di metrological scanning probe microscope. Nanotechnologies in Russia Volume 8, Issue 5-6, May 2013, Pages 337-341
14 сентября 2018
208
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| Вид публикации | Статья |
| Контактные данные автора публикации | Gogolinskii, K.V.a , Gubskii, K.L.b, Kuznetsov, A.P.b, Reshetov, V.N.ab a Technological Institute for Superhard and Novel Carbon Materials, ul. Tsentralnaya 7a, Troitsk, Moscow, 142190, Russian Federation b National Nuclear Research Institute MEPh |
| Ссылка на публикацию в интернете | www.scopus.com/record/display.url?origin=recordpage&eid=2-s2.0-84879722695&citeCnt=29&noHighlight=false&sort=plf-f&src=s&st1=MEPhI&nlo=&nlr=&nls=&sid=F0743CC1BB1CEC168410A18CB87C48A7.Vdktg6RVtMfaQJ4pNTCQ:20&sot=b&sdt=b&sl=31&s=AFFIL(MEPhI) AND PUB |
Аннотация
The construction and operation principle of the metrological NanoScan-3Di scanning probe microscope (SPM) are briefly described. This device is a combination of a commercial NanoScan-3D SPM and a three-coordinate heterodyne laser interferometer. The metrological characteristics and main sources of random uncertainties of this measurement complex have been analyzed. The experiments have demonstrated high reproducibility and low noise level when measuring linear displacements on the nanometer-length scale. © 2013 Pleiades Publishing, Ltd.
Indexed keywords
Heterodyne laser interferometers; High reproducibility; Linear displacements; Low noise levels; Metrological characteristics; Random uncertainties; Scanning probe microscope
ПодробнееIndexed keywords
Heterodyne laser interferometers; High reproducibility; Linear displacements; Low noise levels; Metrological characteristics; Random uncertainties; Scanning probe microscope
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